SERIOS: High Performance Phi & Z- Axis System

We have developed a high performance phi & z - axis system, called project SERIOS, which is a good example of the match between customer expectations and MECAL quality. The SERIOS is a fast, accurate and compact 2D manipulator for pick & place systems of small components.

Unique components

• Customised 2D Air Bearing System
  High accuracy, no friction
• Customised 2D Optical Encoder
  Combined measurement of translation and rotation
• Customised Motor System
  Enables fast translation and rotation
• Contactless Height Measure
  with respect to substrate

SERIOS is a high performance Phi and Z-axis direct driven air bearing stage. The specifications result in low mass and compact design:

For more information, please contact our business unit Semicon Product Development.

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

• Front end
• Back end
• Electronic equipment