SERIOS: High Performance Phi & Z- Axis System
We have developed a high performance phi & z - axis system, called project SERIOS, which is a good example of the match between customer expectations and MECAL quality. The SERIOS is a fast, accurate and compact 2D manipulator for pick & place systems of small components.
- Customised 2D Air Bearing System
High accuracy, no friction
- Customised 2D Optical Encoder
Combined measurement of translation and rotation
- Customised Motor System
Enables fast translation and rotation
- Contactless Height Measure
with respect to substrate
SERIOS is a high performance Phi and Z-axis direct driven air bearing stage. The specifications result in low mass and compact design:
0 - 10 mm
For more information, please contact our business unit Semicon Product Development.