Machine Support Frame

MECAL is specialised in the design, production, installation and verification of Machine Support Frames (MSF). The support frame is installed to support machines that require correction of extremely high specifications regarding stiffness and vibrations.

Steel, concrete and hybrid support frame designs

We realise both steel, concrete and hybrid MSF designs; all designed to meet the requirements of the equipment that it will support. The MSF is designed to achieve a 100% no-defect, first time right installation for all possible sensitive machine types.

Extensive network of highly qualified suppliers

MECAL has built an extensive network of highly qualified suppliers across geographic regions. We work closely with our partners to develop and produce the best possible design based on your specific needs.

MSF for all sensitive machinery

MECAL builds support frames for all sensitive machinery; steppers and scanners, metrology and inspection tools, probing and testing equipment, resist coaters/ developers, and many more. A few examples of our products:

High Stiffness Machines Support Frames

ASML XT
NXE (EUV)
CANON AS7
SEM HITACHI
TEL LITHIUS

Passive Isolated Machines Support Frames

Terma-Wave Opti-Probe

For more information, please contact our business unit Semicon Turn Key Solutions.

Process Flow

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

Front end
Back end
Electronic equipment