Machine Support Frame
MECAL is specialised in the design, production, installation and verification of Machine Support Frames (MSF). The support frame is installed to support machines that require correction of extremely high specifications regarding stiffness and vibrations.
Steel, concrete and hybrid support frame designs
We realise both steel, concrete and hybrid MSF designs; all designed to meet the requirements of the equipment that it will support. The MSF is designed to achieve a 100% no-defect, first time right installation for all possible sensitive machine types.
Extensive network of highly qualified suppliers
MECAL has built an extensive network of highly qualified suppliers across geographic regions. We work closely with our partners to develop and produce the best possible design based on your specific needs.
MSF for all sensitive machinery
MECAL builds support frames for all sensitive machinery; steppers and scanners, metrology and inspection tools, probing and testing equipment, resist coaters/ developers, and many more. A few examples of our products:
High Stiffness Machines Support Frames
- ASML XT
- NXE (EUV)
- CANON AS7
- SEM HITACHI
- TEL LITHIUS
Passive Isolated Machines Support Frames
- Terma-Wave Opti-Probe
For more information, please contact our business unit Semicon Turn Key Solutions.