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A table (Mbase), that supports a mechatronic system (Meq, Ceq), is isolated from the floor with steel springs. Further, a reference mass is connected to the table via a spring with low stiffness.

When floor vibrations disturb the mechatronic system, the position between the reference mass and the table will change. This change is measured with a position sensor (POS) and via a controller eliminated with a voice coil actuator (FORCE). As a result of voice coil actuation, this technology does not require a stiff floor. A 6-DOF isolated Hummingbird platform contains 6 sensor-actuator-units. The low noise of the position sensors does not disturb the control system. This gives us the opportunity to suppress vibrations at low frequencies (around 1 Hz) significantly, see our measurement results.

 

For more information, please contact our business unit Semicon Product Development.

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

• Front end
• Back end
• Electronic equipment