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A table (Mbase), that supports a high-tech system (Meq, Ceq), is isolated from the floor with steel springs. Further, a reference mass is connected to the table via a spring with low stiffness.

When floor vibrations disturb the high-tech system, the position between the reference mass and the table will change. This change is measured with a position sensor (POS) and via a controller eliminated with a voice coil actuator (FORCE). As a result of voice coil actuation, this technology does not require a stiff floor. A 6-DOF isolated Hummingbird platform contains 6 sensor-actuator-units. Horizontal tilt crosstalk is eliminated by a patented vibration sensor decoupling configuration. The low noise of the position sensors does not disturb the control system. This gives us the opportunity to suppress vibrations at low frequencies (around 1 Hz) significantly, see our measurement results.

 

For more information, please contact Dr. ir. J.K. (Johan) van Seggelen at j.vanseggelen@mecal.eu or +31(0)40 2302 717.

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

• Front end
• Back end
• Electronic equipment