Specifications Hummingbird Platform

The graphs below show transfer functions from floor vibrations to table vibrations, measured on a 6-DOF (Degree Of Freedom) isolated Hummingbird platform in X-, Y- and Z-direction.

Total system

- Dimensions (L x W x H): 1200 x 800 x 754 mm

- Weight: 390 kg

- Max load: 30 kg @ center

Table top

- Dimensions (L x W x H): 1200 x 800 x 100 mm

- Weight: 260 kg

- Material: Anodized Aluminum or Granite

- Inserts: On request

Frame

- Weight: 75 kg

- Material: Steel

Sensor actuator modules

- Sensors: Direct position sensors

- Actuators: Voice coil actuators

For more information, please contact our business unit Semicon Product Development.

Process Flow

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

Front end
Back end
Electronic equipment