MECAL developed a groundbreaking technology to suppress floor vibrations with at least a factor of 30 : 1 around 1 Hz in 6 Degrees of Freedom (DOF).

The film shows our 6-DOF active vibration isolated platform (the Hummingbird) and transfer functions from floor vibrations to table vibrations, measured in X-, Y- and Z-direction.

To watch the movie, click here

For more information, please contact our business unit Semicon Product Development.

Process Flow

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

Front end
Back end
Electronic equipment