Home » Semiconductor Industry » Products » Active Vibration Isolation » Hummingbird in action

MECAL developed a groundbreaking technology to suppress floor vibrations with at least a factor of 30 : 1 around 1 Hz in 6 Degrees of Freedom (DOF).

The film shows our 6-DOF active vibration isolated platform (the Hummingbird) and transfer functions from floor vibrations to table vibrations, measured in X-, Y- and Z-direction.

To watch the movie, click here

 

For more information, please contact Dr. ir. J.K. (Johan) van Seggelen at j.vanseggelen@mecal.eu or +31(0)40 2302 717.

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

• Front end
• Back end
• Electronic equipment