Hummingbird: active vibration isolation technology

The high-tech industry constantly requires improvement of the accuracy of mechatronic systems. Floor vibrations around 1 Hz are a limiting factor in the performance of these systems. MECAL now offers a solution to suppress these vibrations significantly.

• Suppression of floor vibrations of at least 30 : 1, see Hummingbird specifications
• Reduction of force disturbances e.g. as a result of machine movement
• Low noise at low frequencies (around 1 Hz) as a result of direct position sensing
• No stiff floor required as a result of voice coil actuation

MECAL is a leading supplier of high-end active vibration isolation technology in the semiconductor and related high-tech industry. With our engineering competences we can carry out dedicated design-in projects and deliver customized platforms.

This model illustrates in which phase of the process we are active (yellow part) with the particular service or product.

• Front end
• Back end
• Electronic equipment