Spec Guard
The moment a new fab is built, the vibration level is low and well within specifications. However, after the placement of tools, auxiliary equipment and the presence of personnel, this level can change. Performance may decrease due to an increased vibration level, and then, a costly investigation / trouble-shooting trajectory starts.
Spec Guard detects vibration levels
MECAL developed Spec Guard, a system that detects vibration levels through the fab or on a specific tool position. The measured vibrations can be checked against any predefined machine spec. When vibration levels exceed the predefined machine specification, a warning is sent to the operator through e-mail, sms or external alarm.
Continuous logging of the vibration level
Apart from the event system, continuous logging of the vibration level is done (averaged 1/3rd octave spectra). This data is used to analyse the starting point of higher level vibration, at any time of the day or week.
Technical Specifications
| Monitoring | Continuous |
| No. channels | 5 X/ Y/ Z channels |
| Bandwidth | 1-100/ 1-200/ 1-400 [Hz] |
| Dynamic range | > 90 dB |
| Noise level | << VC-E (3 μm/ s 1/3rd oct. rms) |
| Momentary views | Time traces, Spectra, Averaged spectra |
| Time history views | Broadband average, Intensity plot spectagram |
| Logging | Averaged 1/3rd oct. data |
| Event warnings | Logging, e-mail, sms or external alarm |
| Reports | Standard event report, standard vibration level report |
| Options | Integrated screen in raised floor |
For more information, please contact our business unit Semicon Turn Key Solutions.